Mulembo, T.; Ikua, B.; Keraita, J.; Niyibizi, A.; Kagiri, C.
(Proceedings of 2013 Mechanical Engineering Conference on Sustainable Research and Innovation, 2017-05-24)
Micromechanical components such as acceleration sen-sors in car safety systems and micro-fluidic circuits are normally made of monocrystalline silicon. The modeling of laser microma-chining of complex shapes using silicon ...