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Optimization of Nd:YAG Laser beam and Process Parameters for Quality Micromachining of Monocrystalline Silicon

Mulembo, Titus Murwa (2015-02-26)

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Author
- Mulembo, Titus Murwa (1)
Subject
- micromachining (1)
- Monocrystalline silicon (1)
- thermal stress (1)
- ... View More
Date Issued
- 2015 (1)
Has File(s)
- Yes (1)