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Optimization of Nd:YAG Laser beam and Process Parameters for Quality Micromachining of Monocrystalline Silicon
Mulembo, Titus Murwa
(
2015-02-26
)
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Author
Mulembo, Titus Murwa (1)
Subject
micromachining (1)
Monocrystalline silicon (1)
thermal stress (1)
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Date Issued
2015 (1)
Has File(s)
Yes (1)